Inventor
AKIYAMA NOBUYUKI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “AKIYAMA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
25 patentsUS4391511AJul 5, 1983
Light exposure device and method
HITACHI LTD153 citations99
US5278012AJan 11, 1994
Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
HITACHI LTD237 citations97
US4614427ASep 30, 1986
Automatic contaminants detection apparatus
HITACHI LTD141 citations96
US4475223AOct 2, 1984
Exposure process and system
HITACHI LTD141 citations96
US4343553AAug 10, 1982
Shape testing apparatus
HITACHI LTD57 citations96
US4115762ASep 19, 1978
Alignment pattern detecting apparatus
HITACHI LTD90 citations96
US5098191AMar 24, 1992
Method of inspecting reticles and apparatus therefor
HITACHI LTD57 citations94
US5046847ASep 10, 1991
Method for detecting foreign matter and device for realizing same
HITACHI LTD100 citations94
US4095905AJun 20, 1978
Surface-defect detecting device
HITACHI LTD33 citations93
US4925755AMay 15, 1990
Method of correcting defect in circuit pattern
HITACHI LTD40 citations92
US4541715ASep 17, 1985
Apparatus for detecting contaminants on the reticle of exposure system
HITACHI LTD33 citations92
US4508453AApr 2, 1985
Pattern detection system
HITACHI LTD48 citations92
US4460273AJul 17, 1984
Test apparatus for defects of plate
HITACHI LTD30 citations92
US4447731AMay 8, 1984
Exterior view examination apparatus
HITACHI LTD45 citations92
US4423331ADec 27, 1983
Method and apparatus for inspecting specimen surface
HITACHI LTD52 citations92
US4965454AOct 23, 1990
Method and apparatus for detecting foreign particle
HITACHI LTD27 citations91
US4362389ADec 7, 1982
Method and apparatus for projection type mask alignment
HITACHI LTD29 citations90
US4153371AMay 8, 1979
Method and apparatus for reduction-projection type mask alignment
HITACHI LTD55 citations90
US4938598AJul 3, 1990
Method and apparatus for position detection on reduction-projection system
HITACHI LTD20 citations82
US4788577ANov 29, 1988
Substrate surface deflecting device
HITACHI LTD22 citations82
US4242702ADec 30, 1980
Apparatus for automatically checking external appearance of object
HITACHI LTD21 citations82
US4504045AMar 12, 1985
Wafer transforming device
HITACHI LTD16 citations74
US4491787AJan 1, 1985
Flatness measuring device
HITACHI LTD12 citations74
US4433235AFeb 21, 1984
Focusing position detecting device in optical magnifying and observing apparatus
HITACHI LTD14 citations74
US4403336ASep 6, 1983
X-Ray exposure apparatus
HITACHI LTD17 citations73
NITTAN CO LTD
3 patentsTANAKA PRECIOUS METAL IND
3 patentsUS10366963B2Jul 30, 2019
Noble metal paste for bonding of semiconductor element
TANAKA PRECIOUS METAL IND0 citations47
US10106691B2Oct 23, 2018
Metal paste for gas sensor electrode formation
TANAKA PRECIOUS METAL IND1 citations47
US9758680B2Sep 12, 2017
Metal paste for gas sensor electrode formation
TANAKA PRECIOUS METAL IND1 citations47