Inventor
KOIZUMI MITSUYOSHI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “KOIZUMI MITSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
19 patentsUS4952058AAug 28, 1990
Method and apparatus for detecting abnormal patterns
HITACHI LTD61 citations96
US4740079AApr 26, 1988
Method of and apparatus for detecting foreign substances
HITACHI LTD72 citations96
US4669875AJun 2, 1987
Foreign particle detecting method and apparatus
HITACHI LTD79 citations96
US4668089AMay 26, 1987
Exposure apparatus and method of aligning exposure mask with workpiece
HITACHI LTD85 citations96
US4614427ASep 30, 1986
Automatic contaminants detection apparatus
HITACHI LTD141 citations96
US4475223AOct 2, 1984
Exposure process and system
HITACHI LTD141 citations96
US5146509ASep 8, 1992
Method of inspecting defects in circuit pattern and system for carrying out the method
HITACHI LTD63 citations95
US5098191AMar 24, 1992
Method of inspecting reticles and apparatus therefor
HITACHI LTD57 citations94
US5046847ASep 10, 1991
Method for detecting foreign matter and device for realizing same
HITACHI LTD100 citations94
US4922308AMay 1, 1990
Method of and apparatus for detecting foreign substance
HITACHI LTD43 citations93
US5225886AJul 6, 1993
Method of and apparatus for detecting foreign substances
HITACHI LTD54 citations92
US4933565AJun 12, 1990
Method and apparatus for correcting defects of X-ray mask
HITACHI LTD43 citations92
US4674875AJun 23, 1987
Method and apparatus for inspecting surface defects on the magnetic disk file memories
HITACHI LTD32 citations92
US4541715ASep 17, 1985
Apparatus for detecting contaminants on the reticle of exposure system
HITACHI LTD33 citations92
US4460273AJul 17, 1984
Test apparatus for defects of plate
HITACHI LTD30 citations92
US4423331ADec 27, 1983
Method and apparatus for inspecting specimen surface
HITACHI LTD52 citations92
US4814596AMar 21, 1989
Detection of surface particles by dual semiconductor lasers having stable illumination intensities
HITACHI LTD16 citations74
US4504045AMar 12, 1985
Wafer transforming device
HITACHI LTD16 citations74
US4433235AFeb 21, 1984
Focusing position detecting device in optical magnifying and observing apparatus
HITACHI LTD14 citations74