Inventor
WEGMANN URS
CH13 patents
⚠️ This page may combine multiple inventors who share the name “WEGMANN URS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BALZERS HOCHVAKUUM
10 patentsUS4448653AMay 15, 1984
Cathode arrangement for sputtering material from a target in a cathode sputtering unit
BALZERS HOCHVAKUUM167 citations98
US4983269AJan 8, 1991
Method for erosion detection of a sputtering target and target arrangement
BALZERS HOCHVAKUUM59 citations95
US4622121ANov 11, 1986
Apparatus for coating materials by cathode sputtering
BALZERS HOCHVAKUUM94 citations93
US5343112AAug 30, 1994
Cathode arrangement
BALZERS HOCHVAKUUM46 citations91
US4748935AJun 7, 1988
Vapor source for vacuum coating installation
BALZERS HOCHVAKUUM23 citations81
US5277938AJan 11, 1994
Method for controlling evaporation for vapor deposition
BALZERS HOCHVAKUUM16 citations70
US5159234AOct 27, 1992
Electron beam generator and emission cathode
BALZERS HOCHVAKUUM18 citations70
US5003151AMar 26, 1991
Method and control arrangement for the evaporation rate of an electron beam
BALZERS HOCHVAKUUM8 citations67
US5021669AJun 4, 1991
Process and system for the control of the focusing of a beam of monopolar charged particles
BALZERS HOCHVAKUUM3 citations61
US5041712AAug 20, 1991
Method for the control of an evaporation process
BALZERS HOCHVAKUUM0 citations51