Inventor
ARITA YOSHINOBU
JP11 patents
Patents
11 patentsUS5462014AOct 31, 1995
Apparatus for growing a thin metallic film
NIPPON TELEGRAPH & TELEPHONE44 citations96
US5019531AMay 28, 1991
Process for selectively growing thin metallic film of copper or gold
NIPPON TELEGRAPH & TELEPHONE118 citations96
US4963242AOct 16, 1990
Plasma etching apparatus
NIPPON TELEGRAPH & TELEPHONE73 citations96
US4531282AJul 30, 1985
Bipolar transistors having vertically arrayed collector-base-emitter with novel polycrystalline base electrode surrounding island emitter and method of making same
NIPPON TELEGRAPH & TELEPHONE63 citations94
US5785877AJul 28, 1998
Dry etching method
NIPPON TELEGRAPH & TELEPHONE29 citations91
US5723383AMar 3, 1998
Semiconductor substrate treatment method
NIPPON TELEGRAPH & TELEPHONE20 citations91
US5104694AApr 14, 1992
Selective chemical vapor deposition of a metallic film on the silicon surface
NIPPON TELEGRAPH & TELEPHONE31 citations91
US4660068AApr 21, 1987
Substrate structure of semiconductor device and method of manufacturing the same
NIPPON TELEGRAPH & TELEPHONE30 citations89
US5316796AMay 31, 1994
Process for growing a thin metallic film
NIPPON TELEGRAPH & TELEPHONE19 citations82
US5080927AJan 14, 1992
Tin thin film formation method
NIPPON TELEGRAPH & TELEPHONE11 citations74
US4920401AApr 24, 1990
Bipolar transistors
NIPPON TELEGRAPH & TELEPHONE15 citations71