Inventor
CHUN SANG-JUN
KR2 patents
Patents
2 patentsUS6684652B2Feb 3, 2004
Method of and an apparatus for regulating the temperature of an electrostatic chuck
SAMSUNG ELECTRONICS CO LTD22 citations90
US5843237ADec 1, 1998
Apparatus for manufacturing a semiconductor device having a wafer loading stage with an annular slope
SAMSUNG ELECTRONICS CO LTD9 citations66