Inventor
NAKASHIMA SADAO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAKASHIMA SADAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS7865070B2Jan 4, 2011
Heat treating apparatus
HITACHI INT ELECTRIC INC521 citations98
US7667301B2Feb 23, 2010
Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
HITACHI INT ELECTRIC INC3 citations62
US7901206B2Mar 8, 2011
Heat-treating apparatus and method of producing substrates
HITACHI INT ELECTRIC INC0 citations40
KOMATSU DENSHI KINZOKU KK
3 patentsUS5658809AAug 19, 1997
SOI substrate and method of producing the same
KOMATSU DENSHI KINZOKU KK46 citations93
US5918136AJun 29, 1999
SOI substrate and method of producing the same
KOMATSU DENSHI KINZOKU KK39 citations90
US5665613ASep 9, 1997
Method of making semiconductor device having SIMOX structure
KOMATSU DENSHI KINZOKU KK31 citations90
SASAKI TAKAFUMI
2 patentsUS8889533B2Nov 18, 2014
Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus
SASAKI TAKAFUMI0 citations40
US8450220B2May 28, 2013
Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate
SASAKI TAKAFUMI0 citations40