Inventor
KATAYAMA TATSUHIKO
JP3 patents
Patents
3 patentsUS5658809AAug 19, 1997
SOI substrate and method of producing the same
KOMATSU DENSHI KINZOKU KK46 citations93
US5918136AJun 29, 1999
SOI substrate and method of producing the same
KOMATSU DENSHI KINZOKU KK39 citations90
US5665613ASep 9, 1997
Method of making semiconductor device having SIMOX structure
KOMATSU DENSHI KINZOKU KK31 citations90