Inventor

HARAGUCHI HIDEO

JP16 patents

⚠️ This page may combine multiple inventors who share the name “HARAGUCHI HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

13 patents

US7513214B2Apr 7, 2009

Plasma processing method and apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD139 citations97

US5636963AJun 10, 1997

Method of handling wafers in a vacuum processing apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD49 citations95

US6340281B1Jan 22, 2002

Method and apparatus for positioning a disk-shaped object

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD23 citations92

US6276892B1Aug 21, 2001

Wafer handling apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92

US6254683B1Jul 3, 2001

Substrate temperature control method and device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations92

US6177646B1Jan 23, 2001

Method and device for plasma treatment

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations92

US5922223AJul 13, 1999

Plasma processing method and apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations92

US5851296ADec 22, 1998

Vacuum processing apparatus and method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92

US6808759B1Oct 26, 2004

Plasma processing method and apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations91

US6648976B1Nov 18, 2003

Apparatus and method for plasma processing

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations84

US6255223B1Jul 3, 2001

Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations84

US6642533B2Nov 4, 2003

Substrate detecting method and device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73

US6447613B1Sep 10, 2002

Substrate dechucking device and substrate dechucking method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62

SONY CORP

3 patents

US5974217AOct 26, 1999

Information transmission system having a reduced number of stored programs and recording media playback drives

SONY CORP64 citations96

US5721803AFeb 24, 1998

Information transmission system having a reduced number of stored programs and recording media playback devices

SONY CORP6 citations73

US5450139ASep 12, 1995

Apparatus for transmitting video signals comprising a memory backup device

SONY CORP12 citations73