Inventor
TODOKORO HIDEO
JP141 patents
⚠️ This page may combine multiple inventors who share the name “TODOKORO HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
45 patentsUS6538249B1Mar 25, 2003
Image-formation apparatus using charged particle beams under various focus conditions
HITACHI LTD118 citations99
US5872358AFeb 16, 1999
Scanning electron microscope
HITACHI LTD132 citations99
US5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US6847038B2Jan 25, 2005
Scanning electron microscope
HITACHI LTD74 citations98
US6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US5481109AJan 2, 1996
Surface analysis method and apparatus for carrying out the same
HITACHI LTD121 citations98
US6946656B2Sep 20, 2005
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD56 citations96
US6646262B1Nov 11, 2003
Scanning electron microscope
HITACHI LTD57 citations96
US6635873B1Oct 21, 2003
Scanning electron microscope with voltage applied to the sample
HITACHI LTD45 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US6084238AJul 4, 2000
Scanning electron microscope
HITACHI LTD47 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5900629AMay 4, 1999
Scanning electron microscope
HITACHI LTD83 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5850326ADec 15, 1998
Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
HITACHI LTD45 citations96
US5608218AMar 4, 1997
Scanning electron microscope
HITACHI LTD69 citations96
US5598002AJan 28, 1997
Electron beam apparatus
HITACHI LTD68 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US5402295AMar 28, 1995
Magnetic recording head capable of defining narrow track width and magnetic recording apparatus using the same
HITACHI LTD72 citations96
US5389787AFeb 14, 1995
Scanning electron microscope
HITACHI LTD65 citations96
US5412209AMay 2, 1995
Electron beam apparatus
HITACHI LTD105 citations95
US7642514B2Jan 5, 2010
Charged particle beam apparatus
HITACHI LTD14 citations93
US7236651B2Jun 26, 2007
Image evaluation method and microscope
HITACHI LTD16 citations93
US7109485B2Sep 19, 2006
Charged particle beam apparatus
HITACHI LTD19 citations93
US7075078B2Jul 11, 2006
Scanning electron microscope
HITACHI LTD20 citations93
US6936818B2Aug 30, 2005
Charged particle beam apparatus
HITACHI LTD12 citations93
US6885001B2Apr 26, 2005
Scanning electron microscope
HITACHI LTD20 citations93
US6864482B2Mar 8, 2005
Electron beam apparatus
HITACHI LTD16 citations93
US6787772B2Sep 7, 2004
Scanning electron microscope
HITACHI LTD32 citations93
US6653633B2Nov 25, 2003
Charged particle beam apparatus
HITACHI LTD22 citations93
US6069356AMay 30, 2000
Scanning electron microscope
HITACHI LTD21 citations93
US6043491AMar 28, 2000
Scanning electron microscope
HITACHI LTD44 citations93
US5939720AAug 17, 1999
Scanning electron microscope
HITACHI LTD41 citations93
US5929439AJul 27, 1999
Scanning microscope
HITACHI LTD19 citations93
US5475218ADec 12, 1995
Instrument and method for 3-dimensional atomic arrangement observation
HITACHI LTD21 citations93
US5387793AFeb 7, 1995
Scanning electron microscope
HITACHI LTD31 citations93
US5283440AFeb 1, 1994
Electron beam writing system used in a cell projection method
HITACHI LTD34 citations93
US5278408AJan 11, 1994
Instrument and method for 3-dimensional atomic arrangement observation
HITACHI LTD27 citations93
US5276325AJan 4, 1994
Scanning microscope and a method of operating such a scanning microscope
HITACHI LTD40 citations93
US4710632ADec 1, 1987
Ion microbeam apparatus
HITACHI LTD28 citations93
US7372028B2May 13, 2008
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD14 citations92
US7087899B2Aug 8, 2006
Sample electrification measurement method and charged particle beam apparatus
HITACHI LTD19 citations92
HITACHI HIGH TECH CORP
5 patentsUS7075076B2Jul 11, 2006
Inspection system, inspection method, and process management method
HITACHI HIGH TECH CORP20 citations93
US7022983B2Apr 4, 2006
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP15 citations93
US6956211B2Oct 18, 2005
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP15 citations93
US6791084B2Sep 14, 2004
Method and scanning electron microscope for measuring dimension of material on sample
HITACHI HIGH TECH CORP51 citations93
US7683319B2Mar 23, 2010
Charge control apparatus and measurement apparatus equipped with the charge control apparatus
HITACHI HIGH TECH CORP36 citations92
Showing the top 50 of 141 patents by PatentIndex Score.