Inventor
CHEFFINGS DAVID F
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHEFFINGS DAVID F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
8 patentsUS5387550AFeb 7, 1995
Method for making a fillet for integrated circuit metal plug
MICRON TECHNOLOGY INC62 citations95
US5994182ANov 30, 1999
Method of reducing outdiffusion from a doped three-dimensional polysilicon film into substrate by using angled implants
MICRON TECHNOLOGY INC25 citations92
US5976960ANov 2, 1999
Method of forming an electrically conductive substrate interconnect continuity region with an angled implant
MICRON TECHNOLOGY INC16 citations81
US5858845AJan 12, 1999
Electrically conductive substrate interconnect continuity region and method of forming same with an angled implant
MICRON TECHNOLOGY INC16 citations81
US6211545B1Apr 3, 2001
Device fabricated by a method of controlling outdiffusion from a doped three-dimensional film
MICRON TECHNOLOGY INC7 citations73
US6159790ADec 12, 2000
Method of controlling outdiffusion in doped three-dimensional film by using angled implants
MICRON TECHNOLOGY INC9 citations73
US6320235B1Nov 20, 2001
Apparatus having low resistance angled implant regions
MICRON TECHNOLOGY INC8 citations72
US6440825B1Aug 27, 2002
Method of controlling outdiffusion in a doped three-dimensional film
MICRON TECHNOLOGY INC2 citations62