Inventor

ODAKE SHIGERU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “ODAKE SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

2 patents

US10950457B2Mar 16, 2021

Substrate processing device, manufacturing method for semiconductor device, and reaction tube

KOKUSAI ELECTRIC CORP5 citations83

US12062546B2Aug 13, 2024

Substrate processing device, manufacturing method for semiconductor device, and reaction tube

KOKUSAI ELECTRIC CORP1 citations62

HITACHI INT ELECTRIC INC

2 patents

US10811271B2Oct 20, 2020

Substrate processing device, manufacturing method for semiconductor device, and reaction tube

HITACHI INT ELECTRIC INC4 citations72

US10403528B2Sep 3, 2019

Substrate-processing apparatus and method of manufacturing semiconductor device

HITACHI INT ELECTRIC INC0 citations40

KOKUSAI ELECTRIC CO LTD

1 patent

US6251189B1Jun 26, 2001

Substrate processing apparatus and substrate processing method

KOKUSAI ELECTRIC CO LTD25 citations92

HITACHIT KOKUSAI ELECTRIC INC

1 patent

US9966289B2May 8, 2018

Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium

HITACHIT KOKUSAI ELECTRIC INC2 citations66