Inventor
YOSHIDOME TED G
US3 patents
Patents
3 patentsUS6345642B1Feb 12, 2002
Method and apparatus for removing processing liquid from a processing liquid path
APPLIED MATERIALS INC31 citations91
US6418960B1Jul 16, 2002
Ultrasonic enhancement for solvent purge of a liquid delivery system
APPLIED MATERIALS INC35 citations90
US6926774B2Aug 9, 2005
Piezoelectric vaporizer
APPLIED MATERIALS INC5 citations60