Inventor
SUGISAKI KATSUMI
JP4 patents
Patents
4 patentsUS6507641B1Jan 14, 2003
X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same
NIKON CORP78 citations96
US6909774B2Jun 21, 2005
Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems
NIKON CORP13 citations83
US10288489B2May 14, 2019
Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction
NIKON CORP4 citations69
US10571340B2Feb 25, 2020
Method and device for measuring wavefront using diffraction grating, and exposure method and device
NIKON CORP0 citations48