P

Inventor

MILLWARD DAN B

US68 patents
⚠️ This page may combine multiple inventors who share the name “MILLWARD DAN B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MILLWARD DAN B

27 patents
US8114300B2Feb 14, 2012

Multi-layer method for formation of registered arrays of cylindrical pores in polymer films

MILLWARD DAN B48 citations98
US8083953B2Dec 27, 2011

Registered structure formation via the application of directed thermal energy to diblock copolymer films

MILLWARD DAN B99 citations98
US8097175B2Jan 17, 2012

Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structure

MILLWARD DAN B43 citations97
US8080615B2Dec 20, 2011

Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide

MILLWARD DAN B34 citations96
US8114301B2Feb 14, 2012

Graphoepitaxial self-assembly of arrays of downward facing half-cylinders

MILLWARD DAN B38 citations95
US8101261B2Jan 24, 2012

One-dimensional arrays of block copolymer cylinders and applications thereof

MILLWARD DAN B58 citations94
US8999492B2Apr 7, 2015

Method to produce nanometer-sized features with directed assembly of block copolymers

MILLWARD DAN B14 citations93
US8557128B2Oct 15, 2013

Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers

MILLWARD DAN B19 citations93
US8513359B2Aug 20, 2013

Crosslinkable graft polymer non preferentially wetted by polystyrene and polyethylene oxide

MILLWARD DAN B22 citations93
US8512846B2Aug 20, 2013

Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly

MILLWARD DAN B20 citations93
US8445592B2May 21, 2013

Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide

MILLWARD DAN B19 citations93
US8409449B2Apr 2, 2013

Registered structure formation via the application of directed thermal energy to diblock copolymer films

MILLWARD DAN B24 citations93
US8394483B2Mar 12, 2013

Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly

MILLWARD DAN B25 citations93
US8304493B2Nov 6, 2012

Methods of forming block copolymers

MILLWARD DAN B19 citations93
US8669645B2Mar 11, 2014

Semiconductor structures including polymer material permeated with metal oxide

MILLWARD DAN B16 citations92
US8609221B2Dec 17, 2013

Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces

MILLWARD DAN B18 citations92
US8518275B2Aug 27, 2013

Graphoepitaxial self-assembly of arrays of downward facing half-cylinders

MILLWARD DAN B15 citations92
US8404124B2Mar 26, 2013

Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces

MILLWARD DAN B26 citations92
US8633112B2Jan 21, 2014

Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference

MILLWARD DAN B15 citations89
US8426313B2Apr 23, 2013

Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference

MILLWARD DAN B28 citations89
US8956713B2Feb 17, 2015

Methods of forming a stamp and a stamp

MILLWARD DAN B10 citations84
US8801894B2Aug 12, 2014

Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers

MILLWARD DAN B11 citations84
US8784974B2Jul 22, 2014

Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers

MILLWARD DAN B12 citations84
US8455082B2Jun 4, 2013

Polymer materials for formation of registered arrays of cylindrical pores

MILLWARD DAN B10 citations84
US8450418B2May 28, 2013

Methods of forming block copolymers, and block copolymer compositions

MILLWARD DAN B14 citations84
US8642157B2Feb 4, 2014

One-dimensional arrays of block copolymer cylinders and applications thereof

MILLWARD DAN B14 citations81
US9142420B2Sep 22, 2015

Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method

MILLWARD DAN B4 citations73

MICRON TECHNOLOGY INC

15 patents
US7964107B2Jun 21, 2011

Methods using block copolymer self-assembly for sub-lithographic patterning

MICRON TECHNOLOGY INC68 citations98
US7959975B2Jun 14, 2011

Methods of patterning a substrate

MICRON TECHNOLOGY INC59 citations98
US8993088B2Mar 31, 2015

Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials

MICRON TECHNOLOGY INC14 citations93
US8785559B2Jul 22, 2014

Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide

MICRON TECHNOLOGY INC17 citations93
US8753738B2Jun 17, 2014

Registered structure formation via the application of directed thermal energy to diblock copolymer films

MICRON TECHNOLOGY INC14 citations93
US8372295B2Feb 12, 2013

Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method

MICRON TECHNOLOGY INC31 citations93
US7300873B2Nov 27, 2007

Systems and methods for forming metal-containing layers using vapor deposition processes

MICRON TECHNOLOGY INC32 citations93
US9293328B2Mar 22, 2016

Semiconductor device structures comprising a polymer bonded to a base material and methods of fabrication

MICRON TECHNOLOGY INC5 citations84
US9276059B2Mar 1, 2016

Semiconductor device structures including metal oxide structures

MICRON TECHNOLOGY INC5 citations84
US9257256B2Feb 9, 2016

Templates including self-assembled block copolymer films

MICRON TECHNOLOGY INC5 citations84
US9087699B2Jul 21, 2015

Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structure

MICRON TECHNOLOGY INC14 citations84
US7732533B2Jun 8, 2010

Zwitterionic block copolymers and methods

MICRON TECHNOLOGY INC5 citations74
US10153200B2Dec 11, 2018

Methods of forming a nanostructured polymer material including block copolymer materials

MICRON TECHNOLOGY INC3 citations73
US10090376B2Oct 2, 2018

Methods of forming semiconductor device structures, and methods of forming capacitor structures

MICRON TECHNOLOGY INC3 citations72
US9229328B2Jan 5, 2016

Methods of forming semiconductor device structures, and related semiconductor device structures

MICRON TECHNOLOGY INC5 citations70

NANO TEX LLC

5 patents

MARSH EUGENE P

2 patents

SILLS SCOTT E

1 patent

Showing the top 50 of 68 patents by PatentIndex Score.