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Inventor
HELIN PHILIPPE
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “HELIN PHILIPPE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMSCAP
2 patents
US6740537B2
May 25, 2004
Process for fabricating a microelectromechanical optical component
MEMSCAP
12 citations
69
US6847756B2
Jan 25, 2005
Optical switching matrix and method of fabricating such a matrix
MEMSCAP
2 citations
55
NAITO YASUYUKI
1 patent
US8610224B2
Dec 17, 2013
MEMS element and electrical device using the same
NAITO YASUYUKI
9 citations
82
JAPAN SCIENCE & TECH CORP
1 patent
US6711321B2
Mar 23, 2004
Mechanical optical switch and method for manufacturing the same
JAPAN SCIENCE & TECH CORP
9 citations
72
IMEC VZW
1 patent
US10267733B2
Apr 23, 2019
Semiconductor device for detecting fluorescent particles
IMEC VZW
1 citations
59