Inventor
DARK CHARLES A
US11 patents
Patents
11 patentsUS6815797B1Nov 9, 2004
Silicide bridged anti-fuse
NAT SEMICONDUCTOR CORP21 citations90
US7507607B1Mar 24, 2009
Method of forming a silicide bridged anti-fuse with a tungsten plug metalization process
NAT SEMICONDUCTOR CORP10 citations81
US7118998B1Oct 10, 2006
Method of forming a conductive structure
NAT SEMICONDUCTOR CORP6 citations72
US7488647B1Feb 10, 2009
System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device
NAT SEMICONDUCTOR CORP2 citations62
US6930010B1Aug 16, 2005
Method of forming a conductive structure in a semiconductor material
NAT SEMICONDUCTOR CORP3 citations61
US6815714B1Nov 9, 2004
Conductive structure in a semiconductor material
NAT SEMICONDUCTOR CORP4 citations61
US7470594B1Dec 30, 2008
System and method for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor
NAT SEMICONDUCTOR CORP4 citations58
US7989883B1Aug 2, 2011
System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device
NAT SEMICONDUCTOR CORP0 citations51
US6812486B1Nov 2, 2004
Conductive structure and method of forming the structure
NAT SEMICONDUCTOR CORP0 citations50
US6179975B1Jan 30, 2001
Method of monitoring target/component consumption for dual use titanium/titanium nitride sputtering
NAT SEMICONDUCTOR CORP1 citations50
US7776708B1Aug 17, 2010
System and method for providing a nitride cap over a polysilicon filled trench to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device
NAT SEMICONDUCTOR CORP0 citations40