Inventor
SHAFER PADRAIC C
US4 patents
Patents
4 patentsUS6570256B2May 27, 2003
Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates
IBM85 citations96
US6664161B2Dec 16, 2003
Method and structure for salicide trench capacitor plate electrode
IBM19 citations92
US6740539B2May 25, 2004
Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates
IBM37 citations91
US6869860B2Mar 22, 2005
Filling high aspect ratio isolation structures with polysilazane based material
IBM35 citations90