Inventor
LU ANDREW
US8 patents
Patents
8 patentsUS6927472B2Aug 9, 2005
Fuse structure and method to form the same
IBM20 citations92
US6803668B2Oct 12, 2004
Process-robust alignment mark structure for semiconductor wafers
IBM20 citations91
US7084427B2Aug 1, 2006
Systems and methods for overlay shift determination
IBM13 citations80
US6924185B2Aug 2, 2005
Fuse structure and method to form the same
IBM6 citations74
US7550303B2Jun 23, 2009
Systems and methods for overlay shift determination
IBM5 citations69
US6372647B1Apr 16, 2002
Via masked line first dual damascene
IBM11 citations69
US7475368B2Jan 6, 2009
Deflection analysis system and method for circuit design
IBM3 citations61
US6908830B2Jun 21, 2005
Method for printing marks on the edges of wafers
IBM2 citations55