Inventor
IIZUKA MASAMI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “IIZUKA MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6825480B1Nov 30, 2004
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD38 citations92
US7030394B2Apr 18, 2006
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD8 citations73
US7348558B2Mar 25, 2008
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD2 citations62