Inventor
HOFFMAN JERZY R
US9 patents
⚠️ This page may combine multiple inventors who share the name “HOFFMAN JERZY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
6 patentsUS6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7394083B2Jul 1, 2008
Systems and methods for EUV light source metrology
CYMER INC24 citations92
US7217941B2May 15, 2007
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
CYMER INC35 citations88
US7518787B2Apr 14, 2009
Drive laser for EUV light source
CYMER INC11 citations84
US7402825B2Jul 22, 2008
LPP EUV drive laser input system
CYMER INC6 citations60