Inventor
KRULL WADE A
US12 patents
⚠️ This page may combine multiple inventors who share the name “KRULL WADE A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMEQUIP INC
9 patentsUS7629590B2Dec 8, 2009
Method and apparatus for extending equipment uptime in ion implantation
SEMEQUIP INC41 citations95
US7609003B2Oct 27, 2009
Ion implantation system and control method
SEMEQUIP INC43 citations95
US7064491B2Jun 20, 2006
Ion implantation system and control method
SEMEQUIP INC40 citations95
US7820981B2Oct 26, 2010
Method and apparatus for extending equipment uptime in ion implantation
SEMEQUIP INC30 citations92
US7666771B2Feb 23, 2010
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
SEMEQUIP INC30 citations92
US7919402B2Apr 5, 2011
Cluster ion implantation for defect engineering
SEMEQUIP INC25 citations89
US7723233B2May 25, 2010
Semiconductor device and method of fabricating a semiconductor device
SEMEQUIP INC12 citations83
US7394202B2Jul 1, 2008
Ion implantation system and control method
SEMEQUIP INC12 citations83
US7528550B2May 5, 2009
Ion implantation system and control method
SEMEQUIP INC3 citations61
KRULL WADE A
3 patentsUS8097529B2Jan 17, 2012
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
KRULL WADE A103 citations97
US8530343B2Sep 10, 2013
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
KRULL WADE A4 citations72
US8236675B2Aug 7, 2012
Semiconductor device and method of fabricating a semiconductor device
KRULL WADE A5 citations72