Inventor
FANG HONGBIN
US16 patents
⚠️ This page may combine multiple inventors who share the name “FANG HONGBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6939804B2Sep 6, 2005
Formation of composite tungsten films
APPLIED MATERIALS INC116 citations98
US6846516B2Jan 25, 2005
Multiple precursor cyclical deposition system
APPLIED MATERIALS INC197 citations98
US7745333B2Jun 29, 2010
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC47 citations97
US7405158B2Jul 29, 2008
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC105 citations96
US7605083B2Oct 20, 2009
Formation of composite tungsten films
APPLIED MATERIALS INC39 citations95
US6827978B2Dec 7, 2004
Deposition of tungsten films
APPLIED MATERIALS INC109 citations95
US6797340B2Sep 28, 2004
Method for depositing refractory metal layers employing sequential deposition techniques
APPLIED MATERIALS INC167 citations95
US7396565B2Jul 8, 2008
Multiple precursor cyclical deposition system
APPLIED MATERIALS INC33 citations92
US7384867B2Jun 10, 2008
Formation of composite tungsten films
APPLIED MATERIALS INC16 citations92
US7256111B2Aug 14, 2007
Pretreatment for electroless deposition
APPLIED MATERIALS INC40 citations92
US7273813B2Sep 25, 2007
Wafer cleaning solution for cobalt electroless application
APPLIED MATERIALS INC11 citations84
US7542132B2Jun 2, 2009
Raman spectroscopy as integrated chemical metrology
APPLIED MATERIALS INC7 citations71
US7910476B2Mar 22, 2011
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop
APPLIED MATERIALS INC3 citations62