Inventor
SHANMUGASUNDRAM ARULKUMAR
US24 patents
⚠️ This page may combine multiple inventors who share the name “SHANMUGASUNDRAM ARULKUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS7341633B2Mar 11, 2008
Apparatus for electroless deposition
APPLIED MATERIALS INC230 citations98
US7659203B2Feb 9, 2010
Electroless deposition process on a silicon contact
APPLIED MATERIALS INC16 citations92
US7651934B2Jan 26, 2010
Process for electroless copper deposition
APPLIED MATERIALS INC25 citations92
US7256111B2Aug 14, 2007
Pretreatment for electroless deposition
APPLIED MATERIALS INC40 citations92
US7247080B1Jul 24, 2007
Feedback controlled polishing processes
APPLIED MATERIALS INC29 citations92
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US7205233B2Apr 17, 2007
Method for forming CoWRe alloys by electroless deposition
APPLIED MATERIALS INC21 citations92
US7024268B1Apr 4, 2006
Feedback controlled polishing processes
APPLIED MATERIALS INC43 citations92
US6413145B1Jul 2, 2002
System for polishing and cleaning substrates
APPLIED MATERIALS INC38 citations92
US6625513B1Sep 23, 2003
Run-to-run control over semiconductor processing tool based upon mirror image target
APPLIED MATERIALS INC29 citations91
US7514353B2Apr 7, 2009
Contact metallization scheme using a barrier layer over a silicide layer
APPLIED MATERIALS INC37 citations90
US6244931B1Jun 12, 2001
Buffer station on CMP system
APPLIED MATERIALS INC28 citations88
US8005634B2Aug 23, 2011
Copper wiring module control
APPLIED MATERIALS INC11 citations84
US7534298B2May 19, 2009
Apparatus and method of detecting the electroless deposition endpoint
APPLIED MATERIALS INC10 citations84
US7273813B2Sep 25, 2007
Wafer cleaning solution for cobalt electroless application
APPLIED MATERIALS INC11 citations84
US6887124B2May 3, 2005
Method of polishing and cleaning substrates
APPLIED MATERIALS INC14 citations84
US7654221B2Feb 2, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC18 citations83
US7827930B2Nov 9, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC17 citations82
US7542132B2Jun 2, 2009
Raman spectroscopy as integrated chemical metrology
APPLIED MATERIALS INC7 citations71
US6350188B1Feb 26, 2002
Drive system for a carrier head support structure
APPLIED MATERIALS INC9 citations71
US7910476B2Mar 22, 2011
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop
APPLIED MATERIALS INC3 citations62
US7473339B2Jan 6, 2009
Slim cell platform plumbing
APPLIED MATERIALS INC3 citations61
US7323058B2Jan 29, 2008
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC4 citations60