P

Inventor

KRAFT ROBERT

US40 patents
⚠️ This page may combine multiple inventors who share the name “KRAFT ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEXAS INSTRUMENTS INC

24 patents
US6136654AOct 24, 2000

Method of forming thin silicon nitride or silicon oxynitride gate dielectrics

TEXAS INSTRUMENTS INC207 citations98
US5796151AAug 18, 1998

Semiconductor stack having a dielectric sidewall for prevention of oxidation of tungsten in tungsten capped poly-silicon gate electrodes

TEXAS INSTRUMENTS INC112 citations98
US6362111B1Mar 26, 2002

Tunable gate linewidth reduction process

TEXAS INSTRUMENTS INC88 citations93
US6261934B1Jul 17, 2001

Dry etch process for small-geometry metal gates over thin gate dielectric

TEXAS INSTRUMENTS INC39 citations93
US7442597B2Oct 28, 2008

Systems and methods that selectively modify liner induced stress

TEXAS INSTRUMENTS INC18 citations92
US6607985B1Aug 19, 2003

Gate stack and etch process

TEXAS INSTRUMENTS INC22 citations92
US6399445B1Jun 4, 2002

Fabrication technique for controlled incorporation of nitrogen in gate dielectric

TEXAS INSTRUMENTS INC51 citations92
US6984580B2Jan 10, 2006

Dual damascene pattern liner

TEXAS INSTRUMENTS INC29 citations91
US6797633B2Sep 28, 2004

In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning

TEXAS INSTRUMENTS INC27 citations90
US6780756B1Aug 24, 2004

Etch back of interconnect dielectrics

TEXAS INSTRUMENTS INC27 citations90
US6214736B1Apr 10, 2001

Silicon processing method

TEXAS INSTRUMENTS INC20 citations89
US7119006B2Oct 10, 2006

Via formation for damascene metal conductors in an integrated circuit

TEXAS INSTRUMENTS INC16 citations84
US6900123B2May 31, 2005

BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control

TEXAS INSTRUMENTS INC12 citations84
US7300883B2Nov 27, 2007

Method for patterning sub-lithographic features in semiconductor manufacturing

TEXAS INSTRUMENTS INC8 citations69
US7282436B2Oct 16, 2007

Plasma treatment for silicon-based dielectrics

TEXAS INSTRUMENTS INC4 citations62
US7985603B2Jul 26, 2011

Ferroelectric capacitor manufacturing process

TEXAS INSTRUMENTS INC4 citations61
US7678713B2Mar 16, 2010

Energy beam treatment to improve packaging reliability

TEXAS INSTRUMENTS INC4 citations60
US7341941B2Mar 11, 2008

Methods to facilitate etch uniformity and selectivity

TEXAS INSTRUMENTS INC2 citations60
US6872665B1Mar 29, 2005

Process flow for dual damescene interconnect structures

TEXAS INSTRUMENTS INC3 citations58
US7687407B2Mar 30, 2010

Method for reducing line edge roughness for conductive features

TEXAS INSTRUMENTS INC2 citations56
US7939400B2May 10, 2011

Systems and methods that selectively modify liner induced stress

TEXAS INSTRUMENTS INC0 citations51
US7723199B2May 25, 2010

Method for cleaning post-etch noble metal residues

TEXAS INSTRUMENTS INC0 citations51
US7682989B2Mar 23, 2010

Formation of a silicon oxide interface layer during silicon carbide etch stop deposition to promote better dielectric stack adhesion

TEXAS INSTRUMENTS INC0 citations46
US7087518B2Aug 8, 2006

Method of passivating and/or removing contaminants on a low-k dielectric/copper surface

TEXAS INSTRUMENTS INC0 citations46

QORVO US INC

7 patents

OCD INNOVATIONS LLC

2 patents

TEXAX INSTR INC

1 patent

AMADEO PAUL

1 patent

CRUISER ACCESS LLC

1 patent

SNN INC

1 patent

KRAFT ROBERT

1 patent

CUBIC CORP

1 patent

RESTIFO LINDA L

1 patent