Inventor

SUGIMURA WATARU

JP24 patents

⚠️ This page may combine multiple inventors who share the name “SUGIMURA WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUGIMURA WATARU

SUMCO CORP

Process for growing silicon single crystal and process for producing silicon wafer

Silicon wafer, method for producing silicon wafer and method for growing silicon single crystal

Method for manufacturing silicon single crystal, and silicon wafer

Silicon wafer, method for manufacturing the same and method for growing silicon single crystals

Method for manufacturing silicon wafer method

Method for controlling convection pattern of silicon melt, method for producing silicon single crystals, and device for pulling silicon single crystals

Silicon monocrystal manufacturing method and silicon monocrystal pulling device

Method of controlling convection patterns of silicon melt and method of manufacturing silicon single crystal

Method for controlling convection pattern of silicon melt and method for producing monocrystalline silicon

Process for producing silicon single crystal

Apparatus for manufacturing semiconductor single crystal

Method for growing silicon single crystal and silicon wafer

Apparatus for manufacturing semiconductor single crystal

Manufacturing method of hydrogen-doped silicon single crystal

Method and apparatus for manufacturing silicon single crystal

Process for producing SOI substrate and process for regeneration of layer transferred wafer in the production

Method of estimating convection pattern of silicon melt, method of estimating oxygen concentration of silicon single crystal, method of manufacturing silicon single crystal, and raising device of silicon single crystal

Method of producing silicon single crystal ingot and silicon single crystal ingot

Silicon wafer, SOI substrate, method for growing silicon single crystal, method for manufacturing silicon wafer, and method for manufacturing SOI substrate

Heating part of silicon single crystal manufacturing device, convection pattern control method for silicon melt, silicon single crystal manufacturing method, silicon wafer manufacturing method, silicon single crystal manufacturing device, and convection pattern control system for silicon melt

Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same

ONO TOSHIAKI

Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT

Silicon wafer and method for manufacturing the same

SUMITOMO MITSUBISHI SILICON

Silicon wafer and method for manufacturing the same