Inventor
PARIKH SUKETU
US9 patents
⚠️ This page may combine multiple inventors who share the name “PARIKH SUKETU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6842659B2Jan 11, 2005
Method and apparatus for providing intra-tool monitoring and control
APPLIED MATERIALS INC18 citations91
US7074626B2Jul 11, 2006
Method and apparatus for providing intra-tool monitoring and control
APPLIED MATERIALS INC8 citations72
US12183631B2Dec 31, 2024
Methods for copper doped hybrid metallization for line and via
APPLIED MATERIALS INC0 citations61
US12334394B2Jun 17, 2025
Methods and apparatus for selective etch stop capping and selective via open for fully landed via on underlying metal
APPLIED MATERIALS INC0 citations59
US12315735B2May 27, 2025
Methods for removing etch stop layers
APPLIED MATERIALS INC0 citations57