Inventor
NAG SOMNATH
US20 patents
⚠️ This page may combine multiple inventors who share the name “NAG SOMNATH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS6214719B1Apr 10, 2001
Method of implementing air-gap technology for low capacitance ILD in the damascene scheme
NOVELLUS SYSTEMS INC110 citations97
US6417092B1Jul 9, 2002
Low dielectric constant etch stop films
NOVELLUS SYSTEMS INC97 citations95
US6764952B1Jul 20, 2004
Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper
NOVELLUS SYSTEMS INC28 citations92
APPLIED MATERIALS INC
3 patentsUS7713881B2May 11, 2010
Process sequence for doped silicon fill of deep trenches
APPLIED MATERIALS INC16 citations92
US7446366B2Nov 4, 2008
Process sequence for doped silicon fill of deep trenches
APPLIED MATERIALS INC15 citations92
US7109097B2Sep 19, 2006
Process sequence for doped silicon fill of deep trenches
APPLIED MATERIALS INC14 citations92
SOLEXEL INC
3 patentsUS7786376B2Aug 31, 2010
High efficiency solar cells and manufacturing methods
SOLEXEL INC17 citations83
US9093323B2Jul 28, 2015
Methods for selectively coating three-dimensional features on a substrate
SOLEXEL INC0 citations52
US9053957B2Jun 9, 2015
Structure and method for creating a reusable template for detachable thin film substrates
SOLEXEL INC0 citations47
MOSLEHI MEHRDAD M
2 patentsUS8241940B2Aug 14, 2012
Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
MOSLEHI MEHRDAD M12 citations83
US9401276B2Jul 26, 2016
Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates
MOSLEHI MEHRDAD M0 citations51