P

Inventor

FRENTZEL RICHARD

US9 patents
⚠️ This page may combine multiple inventors who share the name “FRENTZEL RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ALLISON WILLIAM C

4 patents
US8439994B2May 14, 2013

Method of fabricating a polishing pad with an end-point detection region for eddy current end-point detection

ALLISON WILLIAM C8 citations83
US8628384B2Jan 14, 2014

Polishing pad for eddy current end-point detection

ALLISON WILLIAM C3 citations61
US9028302B2May 12, 2015

Polishing pad for eddy current end-point detection

ALLISON WILLIAM C0 citations51
US8657653B2Feb 25, 2014

Homogeneous polishing pad for eddy current end-point detection

ALLISON WILLIAM C1 citations51

ALLISON WILLIAM

2 patents
US9156124B2Oct 13, 2015

Soft polishing pad for polishing a semiconductor substrate

ALLISON WILLIAM38 citations92
US9017140B2Apr 28, 2015

CMP pad with local area transparency

ALLISON WILLIAM43 citations92

NEXPLANAR CORP

2 patents
US10946495B2Mar 16, 2021

Low density polishing pad

NEXPLANAR CORP0 citations62
US9597777B2Mar 21, 2017

Homogeneous polishing pad for eddy current end-point detection

NEXPLANAR CORP0 citations51

BAJAJ RAJEEV

1 patent
US9296085B2Mar 29, 2016

Polishing pad with homogeneous body having discrete protrusions thereon

BAJAJ RAJEEV32 citations93