Inventor
MCLEOD PAUL STEPHEN
US27 patents
⚠️ This page may combine multiple inventors who share the name “MCLEOD PAUL STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEAGATE TECHNOLOGY LLC
21 patentsUS6290821B1Sep 18, 2001
Sputter deposition utilizing pulsed cathode and substrate bias power
SEAGATE TECHNOLOGY LLC103 citations98
US6843892B1Jan 18, 2005
Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet
SEAGATE TECHNOLOGY LLC29 citations92
US6808741B1Oct 26, 2004
In-line, pass-by method for vapor lubrication
SEAGATE TECHNOLOGY LLC22 citations92
US6582572B2Jun 24, 2003
Target fabrication method for cylindrical cathodes
SEAGATE TECHNOLOGY LLC46 citations92
US6444100B1Sep 3, 2002
Hollow cathode sputter source
SEAGATE TECHNOLOGY LLC37 citations92
US6733590B1May 11, 2004
Method and apparatus for multilayer deposition utilizing a common beam source
SEAGATE TECHNOLOGY LLC19 citations90
US6613151B1Sep 2, 2003
Single disc vapor lubrication
SEAGATE TECHNOLOGY LLC14 citations84
US6309516B1Oct 30, 2001
Method and apparatus for metal allot sputtering
SEAGATE TECHNOLOGY LLC18 citations84
US6886244B1May 3, 2005
Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same
SEAGATE TECHNOLOGY LLC15 citations82
US7041202B2May 9, 2006
Timing apparatus and method to selectively bias during sputtering
SEAGATE TECHNOLOGY LLC10 citations74
US6511702B1Jan 28, 2003
Apparatus and method to control the molecular weight distribution of a vapor
SEAGATE TECHNOLOGY LLC10 citations73
US6569294B1May 27, 2003
Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone
SEAGATE TECHNOLOGY LLC12 citations71
US6468405B1Oct 22, 2002
Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone
SEAGATE TECHNOLOGY LLC13 citations71
US8382902B2Feb 26, 2013
Single disc vapor lubrication
SEAGATE TECHNOLOGY LLC2 citations63
US7828899B2Nov 9, 2010
In-line, pass-by system and method for disc vapor lubrication
SEAGATE TECHNOLOGY LLC2 citations63
US6830600B2Dec 14, 2004
Cold traps for vapor lubrication processes
SEAGATE TECHNOLOGY LLC3 citations63
US6605195B2Aug 12, 2003
Multi-layer deposition process using four ring sputter sources
SEAGATE TECHNOLOGY LLC4 citations63
US7537676B2May 26, 2009
Cathode apparatus to selectively bias pallet during sputtering
SEAGATE TECHNOLOGY LLC5 citations61
US6844031B2Jan 18, 2005
Method & apparatus for multilayer deposition utilizing a common ion beam source
SEAGATE TECHNOLOGY LLC2 citations60
US8728242B2May 20, 2014
Single disc vapor lubrication
SEAGATE TECHNOLOGY LLC0 citations52
US8008632B2Aug 30, 2011
Two-zone ion beam carbon deposition
SEAGATE TECHNOLOGY LLC0 citations51
MCLEOD PAUL STEPHEN
4 patentsUS8652310B2Feb 18, 2014
Trim magnets to adjust erosion rate of cylindrical sputter targets
MCLEOD PAUL STEPHEN6 citations71
US8208238B1Jun 26, 2012
Apparatus for orienting soft-underlayer deposition
MCLEOD PAUL STEPHEN4 citations60
US8808793B2Aug 19, 2014
Disc vapor lubrication
MCLEOD PAUL STEPHEN0 citations51
US8946651B2Feb 3, 2015
Multiple anode ion source
MCLEOD PAUL STEPHEN0 citations50