Inventor

BANG SANG KYU

KR2 patents

Patents

2 patents

US8815616B2Aug 26, 2014

Slit valve unit and film forming apparatus having the same

SAMSUNG ELECTRONICS CO LTD11 citations77

US8809189B2Aug 19, 2014

Method of forming through-silicon via using laser ablation

SAMSUNG ELECTRONICS CO LTD0 citations49