Inventor
SAITO MUTSUMI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “SAITO MUTSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
28 patentsUS7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US6593152B2Jul 15, 2003
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP109 citations99
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7244932B2Jul 17, 2007
Electron beam apparatus and device fabrication method using the electron beam apparatus
EBARA CORP74 citations98
US7601972B2Oct 13, 2009
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP49 citations96
US7223973B2May 29, 2007
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP38 citations96
US7135676B2Nov 14, 2006
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP61 citations96
US7049585B2May 23, 2006
Sheet beam-type testing apparatus
EBARA CORP55 citations96
US8053726B2Nov 8, 2011
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP11 citations93
US7928378B2Apr 19, 2011
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP17 citations93
US7417236B2Aug 26, 2008
Sheet beam-type testing apparatus
EBARA CORP20 citations93
US7411191B2Aug 12, 2008
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP20 citations93
US7408175B2Aug 5, 2008
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP19 citations93
US7297949B2Nov 20, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP28 citations93
US7129485B2Oct 31, 2006
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP30 citations93
US7109484B2Sep 19, 2006
Sheet beam-type inspection apparatus
EBARA CORP23 citations93
US7439502B2Oct 21, 2008
Electron beam apparatus and device production method using the electron beam apparatus
EBARA CORP23 citations92
US7247848B2Jul 24, 2007
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP28 citations92
US5693195ADec 2, 1997
Method of irradiation with electron beams
EBARA CORP44 citations92
US8803103B2Aug 12, 2014
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP6 citations84
US7888642B2Feb 15, 2011
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP9 citations84
US7829871B2Nov 9, 2010
Sheet beam-type testing apparatus
EBARA CORP10 citations84
US7098045B2Aug 29, 2006
Processing method utilizing an apparatus to be sealed against workpiece
EBARA CORP14 citations84
US6869890B2Mar 22, 2005
Processing apparatus to be sealed against workpiece
EBARA CORP12 citations84
US8368031B2Feb 5, 2013
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP3 citations74
US7423267B2Sep 9, 2008
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP8 citations74
US5543615AAug 6, 1996
Beam charge exchanging apparatus
EBARA CORP5 citations61
FUJITSU LTD
4 patentsUS6704415B1Mar 9, 2004
Echo canceler
FUJITSU LTD35 citations92
US7428488B2Sep 23, 2008
Received voice processing apparatus
FUJITSU LTD9 citations84
US7130794B2Oct 31, 2006
Received speech signal processing apparatus and received speech signal reproducing apparatus
FUJITSU LTD2 citations63
US7330813B2Feb 12, 2008
Speech processing apparatus and mobile communication terminal
FUJITSU LTD1 citations52