Inventor
NAGATOMO WATARU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “NAGATOMO WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
14 patentsUS7633061B2Dec 15, 2009
Method and apparatus for measuring pattern dimensions
HITACHI HIGH TECH CORP25 citations92
US7559047B2Jul 7, 2009
Method and apparatus for creating imaging recipe
HITACHI HIGH TECH CORP36 citations92
US7449689B2Nov 11, 2008
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method
HITACHI HIGH TECH CORP23 citations92
US6929892B2Aug 16, 2005
Method of monitoring an exposure process
HITACHI HIGH TECH CORP25 citations92
US8853630B2Oct 7, 2014
Scanning electron microscope and a method for imaging a specimen using the same
HITACHI HIGH TECH CORP5 citations84
US7816062B2Oct 19, 2010
Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern
HITACHI HIGH TECH CORP17 citations84
US7685560B2Mar 23, 2010
Method and apparatus for monitoring exposure process
HITACHI HIGH TECH CORP16 citations84
US7615746B2Nov 10, 2009
Method and apparatus for evaluating pattern shape of a semiconductor device
HITACHI HIGH TECH CORP12 citations84
US10255519B2Apr 9, 2019
Inspection apparatus and method using pattern matching
HITACHI HIGH TECH CORP6 citations73
US8356260B2Jan 15, 2013
Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device
HITACHI HIGH TECH CORP4 citations63
US11669953B2Jun 6, 2023
Pattern matching device and computer program for pattern matching
HITACHI HIGH TECH CORP1 citations62
US12579778B2Mar 17, 2026
Pattern matching device, pattern measuring system, pattern matching program
HITACHI HIGH TECH CORP0 citations52
US12412275B2Sep 9, 2025
Pattern matching device, pattern measurement system, and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations52
US9619727B2Apr 11, 2017
Matching process device, matching process method, and inspection device employing same
HITACHI HIGH TECH CORP1 citations50
MIYAMOTO ATSUSHI
4 patentsUS8158938B2Apr 17, 2012
Scanning electron microscope and a method for imaging a specimen using the same
MIYAMOTO ATSUSHI5 citations73
USRE45224EOct 28, 2014
Method and apparatus for creating imaging recipe
MIYAMOTO ATSUSHI2 citations62
US8642957B2Feb 4, 2014
Scanning electron microscope and a method for imaging a specimen using the same
MIYAMOTO ATSUSHI2 citations62
USRE45204EOct 21, 2014
Method and apparatus for creating imaging recipe
MIYAMOTO ATSUSHI0 citations52