Inventor
BANZHOF HELMUT
DE10 patents
⚠️ This page may combine multiple inventors who share the name “BANZHOF HELMUT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
4 patentsUS8049180B2Nov 1, 2011
Achromatic mass separator
INTEGRATED CIRCUIT TESTING4 citations62
US7763866B2Jul 27, 2010
Charged particle beam device with aperture
INTEGRATED CIRCUIT TESTING5 citations62
US7282711B2Oct 16, 2007
Multiple electron beam device
INTEGRATED CIRCUIT TESTING6 citations58
US7838830B2Nov 23, 2010
Charged particle beam apparatus and method for operating a charged particle beam apparatus
INTEGRATED CIRCUIT TESTING1 citations51