Inventor
CHOI GEUNKYU
KR5 patents
⚠️ This page may combine multiple inventors who share the name “CHOI GEUNKYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS9951422B2Apr 24, 2018
Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors
SAMSUNG ELECTRONICS CO LTD2 citations64
US12230514B2Feb 18, 2025
Substrate processing apparatus including filling gas supply line and substrate processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US10844491B2Nov 24, 2020
Gas supply unit and substrate processing system
SAMSUNG ELECTRONICS CO LTD0 citations33