Inventor

BILOIU COSTEL

US48 patents

⚠️ This page may combine multiple inventors who share the name “BILOIU COSTEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BILOIU COSTEL

APPLIED MATERIALS INC

Resonator, linear accelerator configuration and ion implantation system having rotating exciter

Resonator, linear accelerator configuration and ion implantation system having toroidal resonator

Apparatus, system and techniques for mass analyzed ion beam

Resonator coil having an asymmetrical profile

Apparatus and system including extraction optics having movable blockers

Apparatus and system having extraction assembly for wide angle ion beam

System and method for forming surface relief gratings

Ion extraction optics having non uniform grid assembly

Resonator, linear accelerator configuration and ion implantation system having rotating exciter

Resonator coil having an asymmetrical profile

Tunable extraction assembly for wide angle ion beam

Apparatus and system including high angle extraction optics

Ion extraction optics having novel blocker configuration

Ion extraction optics having novel blocker configuration

Apparatus and system including high angle extraction optics

RF quadrupole particle accelerator

Compact low angle ion beam extraction assembly and processing apparatus

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Extraction apparatus and system for high throughput ion beam processing

Electrodynamic mass analysis

Control of ion angular distribution of ion beams with hidden deflection electrode

Apparatus and techniques to treat substrates using directional plasma and reactive gas

Extreme edge uniformity control

Radio frequency extraction system for charge neutralized ion beam

Extraction apparatus and system for high throughput ion beam processing

Apparatus and techniques to treat substrates using directional plasma and reactive gas

In situ control of ion angular distribution in a processing apparatus

Extreme edge uniformity control

Apparatus and method for differential in situ cleaning

Transparent halo for reduced particle generation

Transparent halo assembly for reduced particle generation

Apparatus and techniques to treat substrates using directional plasma and point of use chemistry

Apparatus and techniques to treat substrates using directional plasma and point of use chemistry

Inductively coupled RF plasma source with magnetic confinement and Faraday shielding

VARIAN SEMICONDUCTOR EQUIPMENT

Ion source cleaning method and apparatus

In situ control of ion angular distribution in a processing apparatus

Techniques for providing a multimode ion source

Hardware plasma interlock system

Inductively coupled plasma ion source with multiple antennas for wide ion beam

Techniques for ion beam current measurement using a scanning beam current transformer

Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control

Wide metal-free plasma flood gun

Extended lifetime ion source

BILOIU COSTEL

Gallium ION source and materials therefore

Small form factor plasma source for high density wide ribbon ion beam generation

High density helicon plasma source for wide ribbon ion beam generation

Ribbon antenna for versatile operation and efficient RF power coupling

SINCLAIR FRANK

Apparatus for controlling the temperature of an RF ion source window

KURUNCZI PETER

Plasma attenuation for uniformity control