Inventor
CHANEY CRAIG R
US41 patents
⚠️ This page may combine multiple inventors who share the name “CHANEY CRAIG R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
11 patentsUS7586109B2Sep 8, 2009
Technique for improving the performance and extending the lifetime of an ion source with gas dilution
VARIAN SEMICONDUCTOR EQUIPMENT41 citations92
US7446326B2Nov 4, 2008
Technique for improving ion implanter productivity
VARIAN SEMICONDUCTOR EQUIPMENT29 citations92
US9287079B2Mar 15, 2016
Apparatus for dynamic temperature control of an ion source
VARIAN SEMICONDUCTOR EQUIPMENT9 citations84
US9142379B2Sep 22, 2015
Ion source and a method for in-situ cleaning thereof
VARIAN SEMICONDUCTOR EQUIPMENT7 citations83
US7888662B2Feb 15, 2011
Ion source cleaning method and apparatus
VARIAN SEMICONDUCTOR EQUIPMENT9 citations83
US7655932B2Feb 2, 2010
Techniques for providing ion source feed materials
VARIAN SEMICONDUCTOR EQUIPMENT10 citations83
US7491947B2Feb 17, 2009
Technique for improving performance and extending lifetime of indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT11 citations83
US9212785B2Dec 15, 2015
Passive isolation assembly and gas transport system
VARIAN SEMICONDUCTOR EQUIPMENT4 citations73
US9018829B2Apr 28, 2015
Excited gas injection for ion implant control
VARIAN SEMICONDUCTOR EQUIPMENT2 citations63
US8003959B2Aug 23, 2011
Ion source cleaning end point detection
VARIAN SEMICONDUCTOR EQUIPMENT4 citations62
US8003957B2Aug 23, 2011
Ethane implantation with a dilution gas
VARIAN SEMICONDUCTOR EQUIPMENT2 citations58
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
10 patentsUS10217654B1Feb 26, 2019
Embedded features for interlocks using additive manufacturing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US10347457B1Jul 9, 2019
Dynamic temperature control of an ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations68
US10892136B2Jan 12, 2021
Ion source thermal gas bushing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations62
US10418223B1Sep 17, 2019
Foil sheet assemblies for ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations55
US9887060B2Feb 6, 2018
Ceramic ion source chamber
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations52
US9741522B1Aug 22, 2017
Ceramic ion source chamber
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations52
US10672634B2Jun 2, 2020
Embedded features for interlocks using additive manufacturing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10535499B2Jan 14, 2020
Varied component density for thermal isolation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9928983B2Mar 27, 2018
Vaporizer for ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49
US10221476B2Mar 5, 2019
Coating insulating materials for improved life
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations41
APPLIED MATERIALS INC
9 patentsUS11664192B2May 30, 2023
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC6 citations82
US10854416B1Dec 1, 2020
Thermally isolated repeller and electrodes
APPLIED MATERIALS INC9 citations82
US11170973B2Nov 9, 2021
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC8 citations81
US12469666B2Nov 11, 2025
Lattice based voltage standoff
APPLIED MATERIALS INC0 citations62
US12154754B2Nov 26, 2024
Molten liquid transport for tunable vaporization in ion sources
APPLIED MATERIALS INC0 citations62
US11239040B2Feb 1, 2022
Thermally isolated repeller and electrodes
APPLIED MATERIALS INC0 citations61
US12400828B2Aug 26, 2025
Temperature control for insertable target holder for solid dopant materials
APPLIED MATERIALS INC0 citations59
US11996281B1May 28, 2024
System and method for introducing aluminum to an ion source
APPLIED MATERIALS INC0 citations59
US12431330B2Sep 30, 2025
Helical voltage standoff
APPLIED MATERIALS INC0 citations56