Inventor
THOMAS IVO ADAM JOHANNES
NL19 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS IVO ADAM JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US7518703B2Apr 14, 2009
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations62
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US9709901B2Jul 18, 2017
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations61
US10088755B2Oct 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9715179B2Jul 25, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10146139B2Dec 4, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
VAN DE KERKHOF MARCUS ADRIANUS
2 patentsBRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58