Inventor
LANDHEER SIEBE
NL15 patents
⚠️ This page may combine multiple inventors who share the name “LANDHEER SIEBE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS9709901B2Jul 18, 2017
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations61
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US10088755B2Oct 2, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9715179B2Jul 25, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10146139B2Dec 4, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
VAN DE KERKHOF MARCUS ADRIANUS
2 patentsBRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58