Inventor
MEESTER ARNOUT JOHANNES
NL8 patents
⚠️ This page may combine multiple inventors who share the name “MEESTER ARNOUT JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS9709901B2Jul 18, 2017
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations61
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10146139B2Dec 4, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US7675606B2Mar 9, 2010
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations42
BRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58