Inventor
MIRANDA MARCIO ALEXANDRE CANO
NL19 patents
⚠️ This page may combine multiple inventors who share the name “MIRANDA MARCIO ALEXANDRE CANO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS9709901B2Jul 18, 2017
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV1 citations61
USRE49297ENov 15, 2022
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations59
US10429741B2Oct 1, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10268127B2Apr 23, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10151984B2Dec 11, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US10146139B2Dec 4, 2018
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations50
US9645506B2May 9, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10191377B2Jan 29, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations49
NIENHUYS HAN-KWANG
2 patentsPATEL HRISHIKESH
2 patentsBRUIJSTENS JEROEN PETER JOHANNES
2 patentsUS8730447B2May 20, 2014
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES3 citations59
US9176371B2Nov 3, 2015
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
BRUIJSTENS JEROEN PETER JOHANNES2 citations58