Inventor
KANG TAEKYUN
KR5 patents
Patents
5 patentsUS10103043B2Oct 16, 2018
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD6 citations78
US10312059B2Jun 4, 2019
Ring member with air holes and substrate processing system including the same
SAMSUNG ELECTRONICS CO LTD1 citations53
US11605567B2Mar 14, 2023
Method of monitoring a semiconductor device fabrication process and method of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US9384803B2Jul 5, 2016
Storage device and latch management method thereof
SAMSUNG ELECTRONICS CO LTD0 citations50
US10566221B2Feb 18, 2020
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD0 citations46