Inventor
UM JUNGHWAN
KR3 patents
Patents
3 patentsUS10672629B2Jun 2, 2020
Ring assembly and chuck assembly having the same
SAMSUNG ELECTRONICS CO LTD5 citations67
US10312059B2Jun 4, 2019
Ring member with air holes and substrate processing system including the same
SAMSUNG ELECTRONICS CO LTD1 citations53
US10892142B2Jan 12, 2021
System for fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations44