Inventor
WITTE STEFAN MICHIEL
NL10 patents
⚠️ This page may combine multiple inventors who share the name “WITTE STEFAN MICHIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS11391677B2Jul 19, 2022
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV5 citations79
US10648919B2May 12, 2020
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV7 citations79
US10088762B2Oct 2, 2018
Inspection apparatus and method
ASML NETHERLANDS BV4 citations70
US11042096B2Jun 22, 2021
Alignment measurement system
ASML NETHERLANDS BV2 citations69
US10788765B2Sep 29, 2020
Method and apparatus for measuring a structure on a substrate
ASML NETHERLANDS BV4 citations69
US10459347B2Oct 29, 2019
Inspection method, inspection apparatus and illumination method and apparatus
ASML NETHERLANDS BV1 citations54
US12474267B2Nov 18, 2025
Wavefront metrology sensor and mask therefor, method for optimizing a mask and associated apparatuses
ASML NETHERLANDS BV0 citations52
US12411421B2Sep 9, 2025
Metrology apparatus based on high harmonic generation and associated method
ASML NETHERLANDS BV0 citations41
US10386735B2Aug 20, 2019
Lithographic apparatus alignment sensor and method
ASML NETHERLANDS BV0 citations41