Inventor
EIKEMA KJELD SIJBRAND EDUARD
NL6 patents
Patents
6 patentsUS11391677B2Jul 19, 2022
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV5 citations79
US10648919B2May 12, 2020
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV7 citations79
US10088762B2Oct 2, 2018
Inspection apparatus and method
ASML NETHERLANDS BV4 citations70
US10788765B2Sep 29, 2020
Method and apparatus for measuring a structure on a substrate
ASML NETHERLANDS BV4 citations69
US10459347B2Oct 29, 2019
Inspection method, inspection apparatus and illumination method and apparatus
ASML NETHERLANDS BV1 citations54
US10386735B2Aug 20, 2019
Lithographic apparatus alignment sensor and method
ASML NETHERLANDS BV0 citations41