Inventor
CHO SU HO
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHO SU HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS10043641B2Aug 7, 2018
Methods and apparatus for processing chamber cleaning end point detection
APPLIED MATERIALS INC7 citations83
US10047440B2Aug 14, 2018
Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices
APPLIED MATERIALS INC0 citations50
US11532464B2Dec 20, 2022
Reactor design for large-area VHF plasma processing with improved uniformity
APPLIED MATERIALS INC0 citations46
US10453728B2Oct 22, 2019
Exchange and flip chamber design for heterojunction solar cell formation
APPLIED MATERIALS INC0 citations36