Inventor

LIU YI-LUN

TW2 patents

Patents

2 patents

US10451979B2Oct 22, 2019

Apparatus for EUV lithography and method of measuring focus

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations66

US11022898B2Jun 1, 2021

Apparatus for EUV lithography and method of measuring focus

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56