Inventor
LO YUAN-YEN
TW7 patents
Patents
7 patentsUS9711420B1Jul 18, 2017
Inline focus monitoring
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10451979B2Oct 22, 2019
Apparatus for EUV lithography and method of measuring focus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations66
US11621191B2Apr 4, 2023
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11022898B2Jun 1, 2021
Apparatus for EUV lithography and method of measuring focus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12204248B2Jan 21, 2025
Surface charge release in lithography developing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10879119B2Dec 29, 2020
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9905471B2Feb 27, 2018
Integrated circuit structure and method forming trenches with different depths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39