Inventor
FUKUNAGA FUMIHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “FUKUNAGA FUMIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
8 patentsUS9858659B2Jan 2, 2018
Pattern inspecting and measuring device and program
HITACHI HIGH TECH CORP9 citations83
US10720307B2Jul 21, 2020
Electron microscope device and inclined hole measurement method using same
HITACHI HIGH TECH CORP2 citations72
US10094658B2Oct 9, 2018
Overlay measurement method, device, and display device
HITACHI HIGH TECH CORP2 citations72
US9390885B2Jul 12, 2016
Superposition measuring apparatus, superposition measuring method, and superposition measuring system
HITACHI HIGH TECH CORP3 citations72
US10712152B2Jul 14, 2020
Overlay error measurement device and computer program
HITACHI HIGH TECH CORP2 citations71
US10783625B2Sep 22, 2020
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI
HITACHI HIGH TECH CORP1 citations62
US9799112B2Oct 24, 2017
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI
HITACHI HIGH TECH CORP1 citations52
US10996569B2May 4, 2021
Measurement device, method and display device
HITACHI HIGH TECH CORP0 citations51