Inventor
SCHILLINGER KAI
DE8 patents
Patents
8 patentsUS10943826B2Mar 9, 2021
Method for arranging a plurality of seed substrates on a carrier element and carrier element having seed substrates
NEXWAFE GMBH0 citations58
US11915922B2Feb 27, 2024
Silicon wafer for an electronic component and method for the production thereof
NEXWAFE GMBH0 citations55
US10985005B2Apr 20, 2021
Silicon wafer for an electronic component and method for the production thereof
NEXWAFE GMBH0 citations55
US11560316B2Jan 24, 2023
Process and apparatus for removal of impurities from chlorosilanes
NEXWAFE GMBH0 citations50
US11862462B2Jan 2, 2024
Method and apparatus for the continuous vapor deposition of silicon on substrates
NEXWAFE GMBH0 citations48
US10975490B2Apr 13, 2021
Apparatus and method for etching one side of a semiconductor substrate
NEXWAFE GMBH0 citations48
US10508365B2Dec 17, 2019
Method and device for producing a semiconductor layer
NEXWAFE GMBH0 citations45
US11519094B2Dec 6, 2022
Apparatus and method for etching one side of a semiconductor layer of a workpiece
NEXWAFE GMBH0 citations40