Inventor

SHEN SHYH-CHIANG

US8 patents

⚠️ This page may combine multiple inventors who share the name “SHEN SHYH-CHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV ILLINOIS

5 patents

US6143997ANov 7, 2000

Low actuation voltage microelectromechanical device and method of manufacture

UNIV ILLINOIS162 citations98

US6717496B2Apr 6, 2004

Electromagnetic energy controlled low actuation voltage microelectromechanical switch

UNIV ILLINOIS20 citations92

US6919784B2Jul 19, 2005

High cycle MEMS device

UNIV ILLINOIS17 citations91

US6678943B1Jan 20, 2004

Method of manufacturing a microelectromechanical switch

UNIV ILLINOIS15 citations83

US7142076B2Nov 28, 2006

High cycle MEMS device

UNIV ILLINOIS6 citations72

XINDIUM TECHNOLOGIES INC

2 patents

US6727530B1Apr 27, 2004

Integrated photodetector and heterojunction bipolar transistors

XINDIUM TECHNOLOGIES INC38 citations91

US7115918B2Oct 3, 2006

Collector layer structure for a double hetero-junction bipolar transistor for power amplification applications

XINDIUM TECHNOLOGIES INC3 citations58

GEORGIA TECH RES INST

1 patent

US11195722B2Dec 7, 2021

Method of manufacture using complementary conductivity-selective wet-etching techniques for III-nitride materials and devices

GEORGIA TECH RES INST0 citations58